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Method of making conductor contacts having enhanced reliability
Issued USPTO 07480990
Methods for forming conductor contacts provide for etching through a capping layer located upon a conductor contact region within a substrate. A first pair of methods provide for etching through at least a lower thickness of the capping layer with other than a reactive ion etch to provide an exposed conductor contact region. A partially overlapping second pair of methods provides for converting at least an upper thickness of the capping layer to a converted material layer that is removed…
Methods for forming conductor contacts provide for etching through a capping layer located upon a conductor contact region within a substrate. A first pair of methods provide for etching through at least a lower thickness of the capping layer with other than a reactive ion etch to provide an exposed conductor contact region. A partially overlapping second pair of methods provides for converting at least an upper thickness of the capping layer to a converted material layer that is removed incident to providing an exposed conductor contact region. As adjunct to any of the methods, a liner layer is formed and located upon the exposed conductor contact region in absence of an undesirable reactive environment.
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Vish Agashe
Vish Agashe
Vish is a software industry professional with passion for world of BigData, Analytics, BI, Social Media, Cloud and Mobile computing. He has expertise in the area of software product development, products management and strategy, M&A due diligence and startups.<br><br>Development Management<br>Onshore-offshore team development<br>Professional Services Management<br>Product Conceptualization<br>Product Engineering<br>Architecture<br>Consulting: Implementation Services<br>Consulting: Products<br>Prodcut and strategy management<br>Customer Success Management<br>Product Strategy<br><br>Specialties: Business Intelligence<br>Analytics<br>Data Integration/Management<br>Data Governance<br>Data Quality<br>MDM<br>Data Modeling<br>Process Modeling<br>ETL Architecture/Management and Development<br>Cloud/On-demand applications <br><br>Industries:<br><br>Hi-Tech<br>Finance<br>Manufacturing<br>Banking/insurance<br>Health care<br>Pharma<br>Services
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